Advanced Transparent Optical Materials (ATOM) study for Mosaic Target Depositions

ASSIGNMENT

Advanced Transparent Optical Materials (ATOM) study for Mosaic Target Depositions

Contact: Martijn Homsma, m.d.homsma@utwente.nl ; and/or Wesley van den Beld, w.t.e.vandenbeld@utwente.nl

Introduction

High Entropy Alloys (HEA) have shown to be difficult to manufacture due to the complexity of mixing 5 or more elements together. Experimentally testing all permutations would make co-deposition using multiple targets beneficial. However, physical limitations prevent the co-deposition of more than 3 elements due to the space required for each target. This assignment looks into the preparation and use of mosaic targets: a targets made out of smaller facets of different elemental targets. The goal is to be able to create targets for the ADC setup at the XUV optics lab that can deposit an alloy at predetermined stoichiometries.

See also: https://doi.org/10.1016/j.pmatsci.2013.10.001 , http://doi.org/10.3390/met12020319 , http://doi.org/10.1109/TPS.2011.2157942

Master Assignment

• Work on exotic deposition methods of High Entropy Alloys via magnetron sputtering (PVD)
• Create mosaic targets and test them yourself for contaminations and stoichiometries
• Work in the XUV lab: sputter co-deposit from 3-targets according to own defined research plan.
• Literature study in plasma conditions
• Perform stoichiometric/compositional analysis (via experts) of deposited samples
• Characterize the resulting samples (structure, stoichiometry, purity, etc) and link to expected performance.

Figure: Mosaic magnetron sputtering target for a mix of AlTiTaZrSi [Padamata2012]